JPS6185151U - - Google Patents
Info
- Publication number
- JPS6185151U JPS6185151U JP16869484U JP16869484U JPS6185151U JP S6185151 U JPS6185151 U JP S6185151U JP 16869484 U JP16869484 U JP 16869484U JP 16869484 U JP16869484 U JP 16869484U JP S6185151 U JPS6185151 U JP S6185151U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- flexible sheet
- separation device
- sliding
- elevating stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims description 5
- 239000002313 adhesive film Substances 0.000 claims description 2
- 239000008188 pellet Substances 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16869484U JPS6185151U (en]) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16869484U JPS6185151U (en]) | 1984-11-08 | 1984-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185151U true JPS6185151U (en]) | 1986-06-04 |
Family
ID=30726455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16869484U Pending JPS6185151U (en]) | 1984-11-08 | 1984-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185151U (en]) |
-
1984
- 1984-11-08 JP JP16869484U patent/JPS6185151U/ja active Pending
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